6/19/2010	12:04:36 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/19/2010	12:04:37 AM	Recipe started at 12:04 AM
6/19/2010	12:04:37 AM	Helium valve closed
6/19/2010	12:04:37 AM	H2 valve closed
6/19/2010	12:04:37 AM	BCl3 valve closed
6/19/2010	12:04:37 AM	PH3 valve closed
6/19/2010	12:04:37 AM	SiCl4 pre valve closed
6/19/2010	12:04:37 AM	SiCl4 post valve closed
6/19/2010	12:04:37 AM	Main Vac valve closed
6/19/2010	12:04:37 AM	Bubbler valve closed
6/19/2010	12:04:37 AM	Bypass valve opened
6/19/2010	12:04:37 AM	Helium MFC set to  0.000000
6/19/2010	12:04:37 AM	H2 MFC set to  0.000000
6/19/2010	12:04:37 AM	BCl3 MFC set to  0.000000
6/19/2010	12:04:37 AM	PHl3 MFC set to  0.000000
6/19/2010	12:04:37 AM	SiCl4 MFC set to  0.000000
6/19/2010	12:04:37 AM	Bypass solenoid MFC set to  0.000000
6/19/2010	12:04:37 AM	Tube furnace set to 0
6/19/2010	12:05:23 AM	Helium valve closed
6/19/2010	12:05:23 AM	H2 valve closed
6/19/2010	12:05:23 AM	BCl3 valve closed
6/19/2010	12:05:23 AM	PH3 valve closed
6/19/2010	12:05:23 AM	SiCl4 pre valve closed
6/19/2010	12:05:23 AM	SiCl4 post valve closed
6/19/2010	12:05:23 AM	Bubbler valve closed
6/19/2010	12:05:23 AM	Main Vac valve opened
6/19/2010	12:05:23 AM	Bypass valve opened
6/19/2010	12:05:23 AM	Helium MFC set to  0.000000
6/19/2010	12:05:23 AM	H2 MFC set to  0.000000
6/19/2010	12:05:23 AM	BCl3 MFC set to  0.000000
6/19/2010	12:05:23 AM	PHl3 MFC set to  0.000000
6/19/2010	12:05:23 AM	SiCl4 MFC set to  0.000000
6/19/2010	12:05:23 AM	Bypass solenoid MFC set to  0.000000
6/19/2010	12:05:23 AM	Tube furnace set to 0
6/19/2010	12:05:23 AM	Run finished at 12:05 AM
6/19/2010	12:05:23 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/19/2010	12:58:39 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/19/2010	12:58:40 PM	Recipe started at 12:58 PM
6/19/2010	12:58:40 PM	H2 valve closed
6/19/2010	12:58:40 PM	BCl3 valve closed
6/19/2010	12:58:40 PM	PH3 valve closed
6/19/2010	12:58:40 PM	SiCl4 pre valve closed
6/19/2010	12:58:40 PM	SiCl4 post valve closed
6/19/2010	12:58:40 PM	Main Vac valve closed
6/19/2010	12:58:40 PM	Bypass valve closed
6/19/2010	12:58:40 PM	Bubbler valve closed
6/19/2010	12:58:40 PM	Helium valve opened
6/19/2010	12:58:40 PM	Helium MFC set to  500.000000
6/19/2010	12:58:40 PM	H2 MFC set to  0.000000
6/19/2010	12:58:40 PM	BCl3 MFC set to  0.000000
6/19/2010	12:58:40 PM	PHl3 MFC set to  0.000000
6/19/2010	12:58:40 PM	SiCl4 MFC set to  0.000000
6/19/2010	12:58:40 PM	Bypass solenoid MFC set to  0.000000
6/19/2010	12:58:40 PM	Tube furnace set to 0
6/19/2010	1:00:00 PM	Helium valve closed
6/19/2010	1:00:00 PM	H2 valve closed
6/19/2010	1:00:00 PM	BCl3 valve closed
6/19/2010	1:00:00 PM	PH3 valve closed
6/19/2010	1:00:00 PM	SiCl4 pre valve closed
6/19/2010	1:00:00 PM	SiCl4 post valve closed
6/19/2010	1:00:00 PM	Main Vac valve closed
6/19/2010	1:00:00 PM	Bypass valve closed
6/19/2010	1:00:00 PM	Bubbler valve closed
6/19/2010	1:00:00 PM	Helium MFC set to  0.000000
6/19/2010	1:00:00 PM	H2 MFC set to  0.000000
6/19/2010	1:00:00 PM	BCl3 MFC set to  0.000000
6/19/2010	1:00:00 PM	PHl3 MFC set to  0.000000
6/19/2010	1:00:00 PM	SiCl4 MFC set to  0.000000
6/19/2010	1:00:00 PM	Bypass solenoid MFC set to  0.000000
6/19/2010	1:00:00 PM	Tube furnace set to 0
6/19/2010	1:00:00 PM	Run finished at 1:00 PM
6/19/2010	1:00:00 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/19/2010	1:04:20 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/19/2010	1:04:21 PM	Recipe started at 1:04 PM
6/19/2010	1:04:21 PM	Helium valve closed
6/19/2010	1:04:21 PM	H2 valve closed
6/19/2010	1:04:21 PM	BCl3 valve closed
6/19/2010	1:04:21 PM	PH3 valve closed
6/19/2010	1:04:21 PM	SiCl4 pre valve closed
6/19/2010	1:04:21 PM	SiCl4 post valve closed
6/19/2010	1:04:21 PM	Main Vac valve closed
6/19/2010	1:04:21 PM	Bubbler valve closed
6/19/2010	1:04:21 PM	Bypass valve opened
6/19/2010	1:04:21 PM	Helium MFC set to  0.000000
6/19/2010	1:04:21 PM	H2 MFC set to  0.000000
6/19/2010	1:04:21 PM	BCl3 MFC set to  0.000000
6/19/2010	1:04:21 PM	PHl3 MFC set to  0.000000
6/19/2010	1:04:21 PM	SiCl4 MFC set to  0.000000
6/19/2010	1:04:21 PM	Bypass solenoid MFC set to  0.000000
6/19/2010	1:04:21 PM	Tube furnace set to 0
6/19/2010	1:05:08 PM	Helium valve closed
6/19/2010	1:05:08 PM	H2 valve closed
6/19/2010	1:05:08 PM	BCl3 valve closed
6/19/2010	1:05:08 PM	PH3 valve closed
6/19/2010	1:05:08 PM	SiCl4 pre valve closed
6/19/2010	1:05:08 PM	SiCl4 post valve closed
6/19/2010	1:05:08 PM	Bubbler valve closed
6/19/2010	1:05:08 PM	Main Vac valve opened
6/19/2010	1:05:08 PM	Bypass valve opened
6/19/2010	1:05:08 PM	Helium MFC set to  0.000000
6/19/2010	1:05:08 PM	H2 MFC set to  0.000000
6/19/2010	1:05:08 PM	BCl3 MFC set to  0.000000
6/19/2010	1:05:08 PM	PHl3 MFC set to  0.000000
6/19/2010	1:05:08 PM	SiCl4 MFC set to  0.000000
6/19/2010	1:05:08 PM	Bypass solenoid MFC set to  0.000000
6/19/2010	1:05:08 PM	Tube furnace set to 0
6/19/2010	1:05:08 PM	Run finished at 1:05 PM
6/19/2010	1:05:08 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/19/2010	1:15:53 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
6/19/2010	1:15:58 PM	Recipe started at 1:15 PM
6/19/2010	1:15:58 PM	H2 valve closed
6/19/2010	1:15:58 PM	BCl3 valve closed
6/19/2010	1:15:58 PM	PH3 valve closed
6/19/2010	1:15:58 PM	SiCl4 pre valve closed
6/19/2010	1:15:58 PM	SiCl4 post valve closed
6/19/2010	1:15:58 PM	Main Vac valve closed
6/19/2010	1:15:58 PM	Bypass valve closed
6/19/2010	1:15:58 PM	Bubbler valve closed
6/19/2010	1:15:58 PM	Helium valve opened
6/19/2010	1:15:58 PM	Helium MFC set to  500.000000
6/19/2010	1:15:58 PM	H2 MFC set to  0.000000
6/19/2010	1:15:58 PM	BCl3 MFC set to  0.000000
6/19/2010	1:15:58 PM	PHl3 MFC set to  0.000000
6/19/2010	1:15:58 PM	SiCl4 MFC set to  0.000000
6/19/2010	1:15:58 PM	Bypass solenoid MFC set to  0.000000
6/19/2010	1:15:59 PM	Tube furnace set to 0
6/19/2010	1:17:21 PM	Helium valve closed
6/19/2010	1:17:21 PM	H2 valve closed
6/19/2010	1:17:21 PM	BCl3 valve closed
6/19/2010	1:17:21 PM	PH3 valve closed
6/19/2010	1:17:21 PM	SiCl4 pre valve closed
6/19/2010	1:17:21 PM	SiCl4 post valve closed
6/19/2010	1:17:21 PM	Main Vac valve closed
6/19/2010	1:17:21 PM	Bypass valve closed
6/19/2010	1:17:21 PM	Bubbler valve closed
6/19/2010	1:17:21 PM	Helium MFC set to  0.000000
6/19/2010	1:17:21 PM	H2 MFC set to  0.000000
6/19/2010	1:17:21 PM	BCl3 MFC set to  0.000000
6/19/2010	1:17:21 PM	PHl3 MFC set to  0.000000
6/19/2010	1:17:21 PM	SiCl4 MFC set to  0.000000
6/19/2010	1:17:21 PM	Bypass solenoid MFC set to  0.000000
6/19/2010	1:17:21 PM	Tube furnace set to 0
6/19/2010	1:17:36 PM	Helium valve closed
6/19/2010	1:17:36 PM	H2 valve closed
6/19/2010	1:17:36 PM	BCl3 valve closed
6/19/2010	1:17:36 PM	PH3 valve closed
6/19/2010	1:17:36 PM	SiCl4 pre valve closed
6/19/2010	1:17:36 PM	SiCl4 post valve closed
6/19/2010	1:17:36 PM	Main Vac valve closed
6/19/2010	1:17:36 PM	Bubbler valve closed
6/19/2010	1:17:36 PM	Bypass valve opened
6/19/2010	1:17:36 PM	Helium MFC set to  0.000000
6/19/2010	1:17:36 PM	H2 MFC set to  0.000000
6/19/2010	1:17:36 PM	BCl3 MFC set to  0.000000
6/19/2010	1:17:36 PM	PHl3 MFC set to  0.000000
6/19/2010	1:17:36 PM	SiCl4 MFC set to  0.000000
6/19/2010	1:17:36 PM	Bypass solenoid MFC set to  0.000000
6/19/2010	1:17:36 PM	Tube furnace set to 0
6/19/2010	1:18:10 PM	Helium valve closed
6/19/2010	1:18:10 PM	H2 valve closed
6/19/2010	1:18:10 PM	BCl3 valve closed
6/19/2010	1:18:10 PM	PH3 valve closed
6/19/2010	1:18:10 PM	SiCl4 pre valve closed
6/19/2010	1:18:10 PM	SiCl4 post valve closed
6/19/2010	1:18:10 PM	Bubbler valve closed
6/19/2010	1:18:10 PM	Main Vac valve opened
6/19/2010	1:18:10 PM	Bypass valve opened
6/19/2010	1:18:10 PM	Helium MFC set to  0.000000
6/19/2010	1:18:10 PM	H2 MFC set to  0.000000
6/19/2010	1:18:10 PM	BCl3 MFC set to  0.000000
6/19/2010	1:18:10 PM	PHl3 MFC set to  0.000000
6/19/2010	1:18:10 PM	SiCl4 MFC set to  0.000000
6/19/2010	1:18:10 PM	Bypass solenoid MFC set to  0.000000
6/19/2010	1:18:10 PM	Tube furnace set to 0
6/19/2010	1:23:10 PM	H2 valve closed
6/19/2010	1:23:10 PM	BCl3 valve closed
6/19/2010	1:23:10 PM	PH3 valve closed
6/19/2010	1:23:10 PM	SiCl4 pre valve closed
6/19/2010	1:23:10 PM	SiCl4 post valve closed
6/19/2010	1:23:10 PM	Main Vac valve closed
6/19/2010	1:23:10 PM	Bypass valve closed
6/19/2010	1:23:10 PM	Bubbler valve closed
6/19/2010	1:23:10 PM	Helium valve opened
6/19/2010	1:23:10 PM	Helium MFC set to  500.000000
6/19/2010	1:23:10 PM	H2 MFC set to  0.000000
6/19/2010	1:23:10 PM	BCl3 MFC set to  0.000000
6/19/2010	1:23:10 PM	PHl3 MFC set to  0.000000
6/19/2010	1:23:10 PM	SiCl4 MFC set to  0.000000
6/19/2010	1:23:10 PM	Bypass solenoid MFC set to  0.000000
6/19/2010	1:23:10 PM	Tube furnace set to 0
6/19/2010	1:24:33 PM	Helium valve closed
6/19/2010	1:24:33 PM	H2 valve closed
6/19/2010	1:24:33 PM	BCl3 valve closed
6/19/2010	1:24:33 PM	PH3 valve closed
6/19/2010	1:24:33 PM	SiCl4 pre valve closed
6/19/2010	1:24:33 PM	SiCl4 post valve closed
6/19/2010	1:24:33 PM	Main Vac valve closed
6/19/2010	1:24:33 PM	Bypass valve closed
6/19/2010	1:24:33 PM	Bubbler valve closed
6/19/2010	1:24:33 PM	Helium MFC set to  0.000000
6/19/2010	1:24:33 PM	H2 MFC set to  0.000000
6/19/2010	1:24:33 PM	BCl3 MFC set to  0.000000
6/19/2010	1:24:33 PM	PHl3 MFC set to  0.000000
6/19/2010	1:24:33 PM	SiCl4 MFC set to  0.000000
6/19/2010	1:24:33 PM	Bypass solenoid MFC set to  0.000000
6/19/2010	1:24:33 PM	Tube furnace set to 0
6/19/2010	1:24:48 PM	Helium valve closed
6/19/2010	1:24:48 PM	H2 valve closed
6/19/2010	1:24:48 PM	BCl3 valve closed
6/19/2010	1:24:48 PM	PH3 valve closed
6/19/2010	1:24:48 PM	SiCl4 pre valve closed
6/19/2010	1:24:48 PM	SiCl4 post valve closed
6/19/2010	1:24:48 PM	Main Vac valve closed
6/19/2010	1:24:48 PM	Bubbler valve closed
6/19/2010	1:24:48 PM	Bypass valve opened
6/19/2010	1:24:48 PM	Helium MFC set to  0.000000
6/19/2010	1:24:48 PM	H2 MFC set to  0.000000
6/19/2010	1:24:48 PM	BCl3 MFC set to  0.000000
6/19/2010	1:24:48 PM	PHl3 MFC set to  0.000000
6/19/2010	1:24:48 PM	SiCl4 MFC set to  0.000000
6/19/2010	1:24:48 PM	Bypass solenoid MFC set to  0.000000
6/19/2010	1:24:48 PM	Tube furnace set to 0
6/19/2010	1:25:22 PM	Helium valve closed
6/19/2010	1:25:22 PM	H2 valve closed
6/19/2010	1:25:22 PM	BCl3 valve closed
6/19/2010	1:25:22 PM	PH3 valve closed
6/19/2010	1:25:22 PM	SiCl4 pre valve closed
6/19/2010	1:25:22 PM	SiCl4 post valve closed
6/19/2010	1:25:22 PM	Bubbler valve closed
6/19/2010	1:25:22 PM	Main Vac valve opened
6/19/2010	1:25:22 PM	Bypass valve opened
6/19/2010	1:25:22 PM	Helium MFC set to  0.000000
6/19/2010	1:25:22 PM	H2 MFC set to  0.000000
6/19/2010	1:25:22 PM	BCl3 MFC set to  0.000000
6/19/2010	1:25:22 PM	PHl3 MFC set to  0.000000
6/19/2010	1:25:22 PM	SiCl4 MFC set to  0.000000
6/19/2010	1:25:22 PM	Bypass solenoid MFC set to  0.000000
6/19/2010	1:25:22 PM	Tube furnace set to 0
6/19/2010	1:30:22 PM	H2 valve closed
6/19/2010	1:30:22 PM	BCl3 valve closed
6/19/2010	1:30:22 PM	PH3 valve closed
6/19/2010	1:30:22 PM	SiCl4 pre valve closed
6/19/2010	1:30:22 PM	SiCl4 post valve closed
6/19/2010	1:30:22 PM	Main Vac valve closed
6/19/2010	1:30:22 PM	Bypass valve closed
6/19/2010	1:30:22 PM	Bubbler valve closed
6/19/2010	1:30:22 PM	Helium valve opened
6/19/2010	1:30:22 PM	Helium MFC set to  500.000000
6/19/2010	1:30:22 PM	H2 MFC set to  0.000000
6/19/2010	1:30:22 PM	BCl3 MFC set to  0.000000
6/19/2010	1:30:22 PM	PHl3 MFC set to  0.000000
6/19/2010	1:30:22 PM	SiCl4 MFC set to  0.000000
6/19/2010	1:30:22 PM	Bypass solenoid MFC set to  0.000000
6/19/2010	1:30:22 PM	Tube furnace set to 0
6/19/2010	1:31:44 PM	Helium valve closed
6/19/2010	1:31:44 PM	H2 valve closed
6/19/2010	1:31:44 PM	BCl3 valve closed
6/19/2010	1:31:44 PM	PH3 valve closed
6/19/2010	1:31:44 PM	SiCl4 pre valve closed
6/19/2010	1:31:44 PM	SiCl4 post valve closed
6/19/2010	1:31:44 PM	Main Vac valve closed
6/19/2010	1:31:44 PM	Bypass valve closed
6/19/2010	1:31:44 PM	Bubbler valve closed
6/19/2010	1:31:44 PM	Helium MFC set to  0.000000
6/19/2010	1:31:44 PM	H2 MFC set to  0.000000
6/19/2010	1:31:44 PM	BCl3 MFC set to  0.000000
6/19/2010	1:31:44 PM	PHl3 MFC set to  0.000000
6/19/2010	1:31:44 PM	SiCl4 MFC set to  0.000000
6/19/2010	1:31:44 PM	Bypass solenoid MFC set to  0.000000
6/19/2010	1:31:45 PM	Tube furnace set to 0
6/19/2010	1:32:00 PM	Helium valve closed
6/19/2010	1:32:00 PM	H2 valve closed
6/19/2010	1:32:00 PM	BCl3 valve closed
6/19/2010	1:32:00 PM	PH3 valve closed
6/19/2010	1:32:00 PM	SiCl4 pre valve closed
6/19/2010	1:32:00 PM	SiCl4 post valve closed
6/19/2010	1:32:00 PM	Main Vac valve closed
6/19/2010	1:32:00 PM	Bubbler valve closed
6/19/2010	1:32:00 PM	Bypass valve opened
6/19/2010	1:32:00 PM	Helium MFC set to  0.000000
6/19/2010	1:32:00 PM	H2 MFC set to  0.000000
6/19/2010	1:32:00 PM	BCl3 MFC set to  0.000000
6/19/2010	1:32:00 PM	PHl3 MFC set to  0.000000
6/19/2010	1:32:00 PM	SiCl4 MFC set to  0.000000
6/19/2010	1:32:00 PM	Bypass solenoid MFC set to  0.000000
6/19/2010	1:32:00 PM	Tube furnace set to 0
6/19/2010	1:32:33 PM	Helium valve closed
6/19/2010	1:32:34 PM	H2 valve closed
6/19/2010	1:32:34 PM	BCl3 valve closed
6/19/2010	1:32:34 PM	PH3 valve closed
6/19/2010	1:32:34 PM	SiCl4 pre valve closed
6/19/2010	1:32:34 PM	SiCl4 post valve closed
6/19/2010	1:32:34 PM	Bubbler valve closed
6/19/2010	1:32:34 PM	Main Vac valve opened
6/19/2010	1:32:34 PM	Bypass valve opened
6/19/2010	1:32:34 PM	Helium MFC set to  0.000000
6/19/2010	1:32:34 PM	H2 MFC set to  0.000000
6/19/2010	1:32:34 PM	BCl3 MFC set to  0.000000
6/19/2010	1:32:34 PM	PHl3 MFC set to  0.000000
6/19/2010	1:32:34 PM	SiCl4 MFC set to  0.000000
6/19/2010	1:32:34 PM	Bypass solenoid MFC set to  0.000000
6/19/2010	1:32:34 PM	Tube furnace set to 0
6/19/2010	1:37:34 PM	Helium valve closed
6/19/2010	1:37:34 PM	H2 valve closed
6/19/2010	1:37:34 PM	BCl3 valve closed
6/19/2010	1:37:34 PM	PH3 valve closed
6/19/2010	1:37:34 PM	SiCl4 pre valve closed
6/19/2010	1:37:34 PM	SiCl4 post valve closed
6/19/2010	1:37:34 PM	Bubbler valve closed
6/19/2010	1:37:34 PM	Main Vac valve opened
6/19/2010	1:37:34 PM	Bypass valve opened
6/19/2010	1:37:34 PM	Helium MFC set to  0.000000
6/19/2010	1:37:34 PM	H2 MFC set to  0.000000
6/19/2010	1:37:34 PM	BCl3 MFC set to  0.000000
6/19/2010	1:37:34 PM	PHl3 MFC set to  0.000000
6/19/2010	1:37:34 PM	SiCl4 MFC set to  0.000000
6/19/2010	1:37:34 PM	Bypass solenoid MFC set to  0.000000
6/19/2010	1:37:34 PM	Tube furnace set to 0
6/19/2010	1:37:35 PM	Run finished at 1:37 PM
6/19/2010	1:37:35 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
6/19/2010	1:55:24 PM	Helium valve opened
6/19/2010	1:55:27 PM	Helium MFC set to  100.000000
6/19/2010	1:55:32 PM	Tube furnace set to 100
6/19/2010	2:06:23 PM	Helium valve closed
6/19/2010	2:06:26 PM	Helium MFC set to  0.000000
6/19/2010	2:07:02 PM	Bypass valve closed
6/19/2010	2:07:03 PM	Main Vac valve closed
6/19/2010	2:07:11 PM	Bypass valve opened
6/19/2010	2:07:11 PM	Main Vac valve opened
6/19/2010	2:08:03 PM	Bypass valve closed
6/19/2010	2:08:04 PM	Bypass valve opened
6/19/2010	2:08:23 PM	Tube furnace set to 0
6/19/2010	2:08:38 PM	Recipe started at 2:08 PM
6/19/2010	2:08:38 PM	Helium valve closed
6/19/2010	2:08:38 PM	BCl3 valve closed
6/19/2010	2:08:38 PM	PH3 valve closed
6/19/2010	2:08:38 PM	SiCl4 pre valve closed
6/19/2010	2:08:38 PM	SiCl4 post valve closed
6/19/2010	2:08:38 PM	Main Vac valve closed
6/19/2010	2:08:38 PM	Bypass valve closed
6/19/2010	2:08:38 PM	Bubbler valve closed
6/19/2010	2:08:38 PM	H2 valve opened
6/19/2010	2:08:38 PM	Helium MFC set to  0.000000
6/19/2010	2:08:38 PM	H2 MFC set to  500.000000
6/19/2010	2:08:38 PM	BCl3 MFC set to  0.000000
6/19/2010	2:08:38 PM	PHl3 MFC set to  0.000000
6/19/2010	2:08:38 PM	SiCl4 MFC set to  0.000000
6/19/2010	2:08:38 PM	Bypass solenoid MFC set to  0.000000
6/19/2010	2:08:38 PM	Tube furnace set to 0
6/19/2010	2:09:59 PM	Helium valve closed
6/19/2010	2:09:59 PM	BCl3 valve closed
6/19/2010	2:09:59 PM	PH3 valve closed
6/19/2010	2:09:59 PM	SiCl4 pre valve closed
6/19/2010	2:09:59 PM	SiCl4 post valve closed
6/19/2010	2:09:59 PM	Main Vac valve closed
6/19/2010	2:09:59 PM	Bypass valve closed
6/19/2010	2:09:59 PM	H2 valve opened
6/19/2010	2:09:59 PM	Bubbler valve opened
6/19/2010	2:09:59 PM	Helium MFC set to  0.000000
6/19/2010	2:09:59 PM	H2 MFC set to  500.000000
6/19/2010	2:09:59 PM	BCl3 MFC set to  0.000000
6/19/2010	2:09:59 PM	PHl3 MFC set to  0.000000
6/19/2010	2:09:59 PM	SiCl4 MFC set to  0.000000
6/19/2010	2:09:59 PM	Bypass solenoid MFC set to  0.000000
6/19/2010	2:09:59 PM	Tube furnace set to 1000
6/19/2010	2:18:46 PM	Helium valve closed
6/19/2010	2:18:46 PM	PH3 valve closed
6/19/2010	2:18:46 PM	Main Vac valve closed
6/19/2010	2:18:46 PM	Bypass valve closed
6/19/2010	2:18:46 PM	H2 valve opened
6/19/2010	2:18:46 PM	BCl3 valve opened
6/19/2010	2:18:46 PM	SiCl4 pre valve opened
6/19/2010	2:18:46 PM	SiCl4 post valve opened
6/19/2010	2:18:46 PM	Bubbler valve opened
6/19/2010	2:18:46 PM	Helium MFC set to  0.000000
6/19/2010	2:18:46 PM	H2 MFC set to  500.000000
6/19/2010	2:18:46 PM	BCl3 MFC set to  35.000000
6/19/2010	2:18:46 PM	PHl3 MFC set to  0.000000
6/19/2010	2:18:46 PM	SiCl4 MFC set to  50.000000
6/19/2010	2:18:46 PM	Bypass solenoid MFC set to  0.000000
6/19/2010	2:18:46 PM	Tube furnace set to 1000
6/19/2010	2:22:09 PM	Helium valve closed
6/19/2010	2:22:09 PM	PH3 valve closed
6/19/2010	2:22:09 PM	Main Vac valve closed
6/19/2010	2:22:09 PM	Bypass valve closed
6/19/2010	2:22:09 PM	H2 valve opened
6/19/2010	2:22:09 PM	BCl3 valve opened
6/19/2010	2:22:09 PM	SiCl4 pre valve opened
6/19/2010	2:22:09 PM	SiCl4 post valve opened
6/19/2010	2:22:09 PM	Bubbler valve opened
6/19/2010	2:22:09 PM	Helium MFC set to  0.000000
6/19/2010	2:22:09 PM	H2 MFC set to  500.000000
6/19/2010	2:22:09 PM	BCl3 MFC set to  35.000000
6/19/2010	2:22:09 PM	PHl3 MFC set to  0.000000
6/19/2010	2:22:09 PM	SiCl4 MFC set to  50.000000
6/19/2010	2:22:09 PM	Bypass solenoid MFC set to  0.000000
6/19/2010	2:22:09 PM	Tube furnace set to 1000
6/19/2010	2:27:09 PM	H2 valve closed
6/19/2010	2:27:09 PM	BCl3 valve closed
6/19/2010	2:27:09 PM	PH3 valve closed
6/19/2010	2:27:09 PM	SiCl4 pre valve closed
6/19/2010	2:27:09 PM	SiCl4 post valve closed
6/19/2010	2:27:09 PM	Main Vac valve closed
6/19/2010	2:27:09 PM	Bypass valve closed
6/19/2010	2:27:09 PM	Helium valve opened
6/19/2010	2:27:09 PM	Bubbler valve opened
6/19/2010	2:27:09 PM	Helium MFC set to  500.000000
6/19/2010	2:27:09 PM	H2 MFC set to  0.000000
6/19/2010	2:27:09 PM	BCl3 MFC set to  0.000000
6/19/2010	2:27:09 PM	PHl3 MFC set to  0.000000
6/19/2010	2:27:09 PM	SiCl4 MFC set to  0.000000
6/19/2010	2:27:09 PM	Bypass solenoid MFC set to  0.000000
6/19/2010	2:27:10 PM	Tube furnace set to 0
6/19/2010	2:47:10 PM	Helium valve closed
6/19/2010	2:47:10 PM	H2 valve closed
6/19/2010	2:47:10 PM	BCl3 valve closed
6/19/2010	2:47:10 PM	PH3 valve closed
6/19/2010	2:47:10 PM	SiCl4 pre valve closed
6/19/2010	2:47:10 PM	SiCl4 post valve closed
6/19/2010	2:47:10 PM	Main Vac valve closed
6/19/2010	2:47:10 PM	Bypass valve closed
6/19/2010	2:47:10 PM	Bubbler valve closed
6/19/2010	2:47:10 PM	Helium MFC set to  0.000000
6/19/2010	2:47:10 PM	H2 MFC set to  0.000000
6/19/2010	2:47:10 PM	BCl3 MFC set to  0.000000
6/19/2010	2:47:10 PM	PHl3 MFC set to  0.000000
6/19/2010	2:47:10 PM	SiCl4 MFC set to  0.000000
6/19/2010	2:47:10 PM	Bypass solenoid MFC set to  0.000000
6/19/2010	2:47:10 PM	Tube furnace set to 0
6/19/2010	2:47:10 PM	Run finished at 2:47 PM
6/19/2010	3:04:05 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/19/2010	3:04:05 PM	Recipe started at 3:04 PM
6/19/2010	3:04:05 PM	Helium valve closed
6/19/2010	3:04:05 PM	H2 valve closed
6/19/2010	3:04:05 PM	BCl3 valve closed
6/19/2010	3:04:05 PM	PH3 valve closed
6/19/2010	3:04:05 PM	SiCl4 pre valve closed
6/19/2010	3:04:05 PM	SiCl4 post valve closed
6/19/2010	3:04:05 PM	Main Vac valve closed
6/19/2010	3:04:05 PM	Bubbler valve closed
6/19/2010	3:04:05 PM	Bypass valve opened
6/19/2010	3:04:05 PM	Helium MFC set to  0.000000
6/19/2010	3:04:05 PM	H2 MFC set to  0.000000
6/19/2010	3:04:05 PM	BCl3 MFC set to  0.000000
6/19/2010	3:04:05 PM	PHl3 MFC set to  0.000000
6/19/2010	3:04:05 PM	SiCl4 MFC set to  0.000000
6/19/2010	3:04:05 PM	Bypass solenoid MFC set to  0.000000
6/19/2010	3:04:05 PM	Tube furnace set to 0
6/19/2010	3:04:53 PM	Helium valve closed
6/19/2010	3:04:53 PM	H2 valve closed
6/19/2010	3:04:53 PM	BCl3 valve closed
6/19/2010	3:04:53 PM	PH3 valve closed
6/19/2010	3:04:53 PM	SiCl4 pre valve closed
6/19/2010	3:04:53 PM	SiCl4 post valve closed
6/19/2010	3:04:53 PM	Bubbler valve closed
6/19/2010	3:04:53 PM	Main Vac valve opened
6/19/2010	3:04:53 PM	Bypass valve opened
6/19/2010	3:04:53 PM	Helium MFC set to  0.000000
6/19/2010	3:04:53 PM	H2 MFC set to  0.000000
6/19/2010	3:04:53 PM	BCl3 MFC set to  0.000000
6/19/2010	3:04:53 PM	PHl3 MFC set to  0.000000
6/19/2010	3:04:53 PM	SiCl4 MFC set to  0.000000
6/19/2010	3:04:53 PM	Bypass solenoid MFC set to  0.000000
6/19/2010	3:04:53 PM	Tube furnace set to 0
6/19/2010	3:04:53 PM	Run finished at 3:04 PM
6/19/2010	3:04:53 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/19/2010	3:27:55 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/19/2010	3:27:55 PM	Recipe started at 3:27 PM
6/19/2010	3:27:55 PM	H2 valve closed
6/19/2010	3:27:55 PM	BCl3 valve closed
6/19/2010	3:27:55 PM	PH3 valve closed
6/19/2010	3:27:55 PM	SiCl4 pre valve closed
6/19/2010	3:27:55 PM	SiCl4 post valve closed
6/19/2010	3:27:55 PM	Main Vac valve closed
6/19/2010	3:27:55 PM	Bypass valve closed
6/19/2010	3:27:55 PM	Bubbler valve closed
6/19/2010	3:27:55 PM	Helium valve opened
6/19/2010	3:27:55 PM	Helium MFC set to  500.000000
6/19/2010	3:27:55 PM	H2 MFC set to  0.000000
6/19/2010	3:27:55 PM	BCl3 MFC set to  0.000000
6/19/2010	3:27:55 PM	PHl3 MFC set to  0.000000
6/19/2010	3:27:55 PM	SiCl4 MFC set to  0.000000
6/19/2010	3:27:55 PM	Bypass solenoid MFC set to  0.000000
6/19/2010	3:27:55 PM	Tube furnace set to 0
6/19/2010	3:29:14 PM	Helium valve closed
6/19/2010	3:29:14 PM	H2 valve closed
6/19/2010	3:29:14 PM	BCl3 valve closed
6/19/2010	3:29:14 PM	PH3 valve closed
6/19/2010	3:29:14 PM	SiCl4 pre valve closed
6/19/2010	3:29:14 PM	SiCl4 post valve closed
6/19/2010	3:29:14 PM	Main Vac valve closed
6/19/2010	3:29:14 PM	Bypass valve closed
6/19/2010	3:29:14 PM	Bubbler valve closed
6/19/2010	3:29:14 PM	Helium MFC set to  0.000000
6/19/2010	3:29:14 PM	H2 MFC set to  0.000000
6/19/2010	3:29:14 PM	BCl3 MFC set to  0.000000
6/19/2010	3:29:14 PM	PHl3 MFC set to  0.000000
6/19/2010	3:29:14 PM	SiCl4 MFC set to  0.000000
6/19/2010	3:29:14 PM	Bypass solenoid MFC set to  0.000000
6/19/2010	3:29:14 PM	Tube furnace set to 0
6/19/2010	3:29:14 PM	Run finished at 3:29 PM
6/19/2010	3:29:14 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/19/2010	3:31:40 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/19/2010	3:31:41 PM	Recipe started at 3:31 PM
6/19/2010	3:31:41 PM	Helium valve closed
6/19/2010	3:31:41 PM	H2 valve closed
6/19/2010	3:31:41 PM	BCl3 valve closed
6/19/2010	3:31:41 PM	PH3 valve closed
6/19/2010	3:31:41 PM	SiCl4 pre valve closed
6/19/2010	3:31:41 PM	SiCl4 post valve closed
6/19/2010	3:31:41 PM	Main Vac valve closed
6/19/2010	3:31:41 PM	Bubbler valve closed
6/19/2010	3:31:41 PM	Bypass valve opened
6/19/2010	3:31:41 PM	Helium MFC set to  0.000000
6/19/2010	3:31:41 PM	H2 MFC set to  0.000000
6/19/2010	3:31:41 PM	BCl3 MFC set to  0.000000
6/19/2010	3:31:41 PM	PHl3 MFC set to  0.000000
6/19/2010	3:31:41 PM	SiCl4 MFC set to  0.000000
6/19/2010	3:31:41 PM	Bypass solenoid MFC set to  0.000000
6/19/2010	3:31:41 PM	Tube furnace set to 0
6/19/2010	3:32:27 PM	Helium valve closed
6/19/2010	3:32:27 PM	H2 valve closed
6/19/2010	3:32:27 PM	BCl3 valve closed
6/19/2010	3:32:27 PM	PH3 valve closed
6/19/2010	3:32:27 PM	SiCl4 pre valve closed
6/19/2010	3:32:27 PM	SiCl4 post valve closed
6/19/2010	3:32:27 PM	Bubbler valve closed
6/19/2010	3:32:27 PM	Main Vac valve opened
6/19/2010	3:32:27 PM	Bypass valve opened
6/19/2010	3:32:27 PM	Helium MFC set to  0.000000
6/19/2010	3:32:27 PM	H2 MFC set to  0.000000
6/19/2010	3:32:27 PM	BCl3 MFC set to  0.000000
6/19/2010	3:32:27 PM	PHl3 MFC set to  0.000000
6/19/2010	3:32:27 PM	SiCl4 MFC set to  0.000000
6/19/2010	3:32:27 PM	Bypass solenoid MFC set to  0.000000
6/19/2010	3:32:27 PM	Tube furnace set to 0
6/19/2010	3:32:28 PM	Run finished at 3:32 PM
6/19/2010	3:32:28 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/19/2010	3:32:53 PM	Tube furnace set to 0
6/19/2010	4:19:55 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
6/19/2010	4:20:01 PM	Recipe started at 4:19 PM
6/19/2010	4:20:01 PM	H2 valve closed
6/19/2010	4:20:01 PM	BCl3 valve closed
6/19/2010	4:20:01 PM	PH3 valve closed
6/19/2010	4:20:01 PM	SiCl4 pre valve closed
6/19/2010	4:20:01 PM	SiCl4 post valve closed
6/19/2010	4:20:01 PM	Main Vac valve closed
6/19/2010	4:20:01 PM	Bypass valve closed
6/19/2010	4:20:01 PM	Bubbler valve closed
6/19/2010	4:20:01 PM	Helium valve opened
6/19/2010	4:20:01 PM	Helium MFC set to  500.000000
6/19/2010	4:20:01 PM	H2 MFC set to  0.000000
6/19/2010	4:20:01 PM	BCl3 MFC set to  0.000000
6/19/2010	4:20:01 PM	PHl3 MFC set to  0.000000
6/19/2010	4:20:01 PM	SiCl4 MFC set to  0.000000
6/19/2010	4:20:01 PM	Bypass solenoid MFC set to  0.000000
6/19/2010	4:20:01 PM	Tube furnace set to 0
6/19/2010	4:20:01 PM	Run aborted at 4:20 PM
6/19/2010	4:20:01 PM	Helium valve closed
6/19/2010	4:20:01 PM	H2 valve closed
6/19/2010	4:20:01 PM	BCl3 valve closed
6/19/2010	4:20:01 PM	PH3 valve closed
6/19/2010	4:20:01 PM	SiCl4 pre valve closed
6/19/2010	4:20:01 PM	SiCl4 post valve closed
6/19/2010	4:20:01 PM	Bypass valve closed
6/19/2010	4:20:01 PM	Main Vac valve closed
6/19/2010	4:20:01 PM	Bubbler valve closed
6/19/2010	4:20:01 PM	Helium MFC set to  0.000000
6/19/2010	4:20:01 PM	H2 MFC set to  0.000000
6/19/2010	4:20:01 PM	BCl3 MFC set to  0.000000
6/19/2010	4:20:01 PM	PHl3 MFC set to  0.000000
6/19/2010	4:20:01 PM	SiCl4 MFC set to  0.000000
6/19/2010	4:20:01 PM	Tube furnace set to 0
6/19/2010	4:20:01 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
6/19/2010	4:20:07 PM	Tube furnace set to 100
6/19/2010	4:20:08 PM	Main Vac valve opened
6/19/2010	4:20:09 PM	Bypass valve opened
6/19/2010	4:20:13 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
6/19/2010	4:20:18 PM	Recipe started at 4:20 PM
6/19/2010	4:20:18 PM	H2 valve closed
6/19/2010	4:20:18 PM	BCl3 valve closed
6/19/2010	4:20:18 PM	PH3 valve closed
6/19/2010	4:20:18 PM	SiCl4 pre valve closed
6/19/2010	4:20:18 PM	SiCl4 post valve closed
6/19/2010	4:20:18 PM	Main Vac valve closed
6/19/2010	4:20:18 PM	Bypass valve closed
6/19/2010	4:20:18 PM	Bubbler valve closed
6/19/2010	4:20:18 PM	Helium valve opened
6/19/2010	4:20:18 PM	Helium MFC set to  500.000000
6/19/2010	4:20:18 PM	H2 MFC set to  0.000000
6/19/2010	4:20:18 PM	BCl3 MFC set to  0.000000
6/19/2010	4:20:18 PM	PHl3 MFC set to  0.000000
6/19/2010	4:20:18 PM	SiCl4 MFC set to  0.000000
6/19/2010	4:20:18 PM	Bypass solenoid MFC set to  0.000000
6/19/2010	4:20:18 PM	Tube furnace set to 0
6/19/2010	4:21:39 PM	Helium valve closed
6/19/2010	4:21:39 PM	H2 valve closed
6/19/2010	4:21:39 PM	BCl3 valve closed
6/19/2010	4:21:39 PM	PH3 valve closed
6/19/2010	4:21:39 PM	SiCl4 pre valve closed
6/19/2010	4:21:39 PM	SiCl4 post valve closed
6/19/2010	4:21:39 PM	Main Vac valve closed
6/19/2010	4:21:39 PM	Bypass valve closed
6/19/2010	4:21:39 PM	Bubbler valve closed
6/19/2010	4:21:39 PM	Helium MFC set to  0.000000
6/19/2010	4:21:39 PM	H2 MFC set to  0.000000
6/19/2010	4:21:39 PM	BCl3 MFC set to  0.000000
6/19/2010	4:21:39 PM	PHl3 MFC set to  0.000000
6/19/2010	4:21:39 PM	SiCl4 MFC set to  0.000000
6/19/2010	4:21:39 PM	Bypass solenoid MFC set to  0.000000
6/19/2010	4:21:39 PM	Tube furnace set to 0
6/19/2010	4:21:54 PM	Helium valve closed
6/19/2010	4:21:54 PM	H2 valve closed
6/19/2010	4:21:54 PM	BCl3 valve closed
6/19/2010	4:21:54 PM	PH3 valve closed
6/19/2010	4:21:54 PM	SiCl4 pre valve closed
6/19/2010	4:21:54 PM	SiCl4 post valve closed
6/19/2010	4:21:54 PM	Main Vac valve closed
6/19/2010	4:21:54 PM	Bubbler valve closed
6/19/2010	4:21:54 PM	Bypass valve opened
6/19/2010	4:21:54 PM	Helium MFC set to  0.000000
6/19/2010	4:21:54 PM	H2 MFC set to  0.000000
6/19/2010	4:21:54 PM	BCl3 MFC set to  0.000000
6/19/2010	4:21:54 PM	PHl3 MFC set to  0.000000
6/19/2010	4:21:54 PM	SiCl4 MFC set to  0.000000
6/19/2010	4:21:54 PM	Bypass solenoid MFC set to  0.000000
6/19/2010	4:21:54 PM	Tube furnace set to 0
6/19/2010	4:22:28 PM	Helium valve closed
6/19/2010	4:22:28 PM	H2 valve closed
6/19/2010	4:22:28 PM	BCl3 valve closed
6/19/2010	4:22:28 PM	PH3 valve closed
6/19/2010	4:22:28 PM	SiCl4 pre valve closed
6/19/2010	4:22:28 PM	SiCl4 post valve closed
6/19/2010	4:22:28 PM	Bubbler valve closed
6/19/2010	4:22:28 PM	Main Vac valve opened
6/19/2010	4:22:28 PM	Bypass valve opened
6/19/2010	4:22:28 PM	Helium MFC set to  0.000000
6/19/2010	4:22:28 PM	H2 MFC set to  0.000000
6/19/2010	4:22:28 PM	BCl3 MFC set to  0.000000
6/19/2010	4:22:28 PM	PHl3 MFC set to  0.000000
6/19/2010	4:22:28 PM	SiCl4 MFC set to  0.000000
6/19/2010	4:22:28 PM	Bypass solenoid MFC set to  0.000000
6/19/2010	4:22:28 PM	Tube furnace set to 0
6/19/2010	4:27:28 PM	H2 valve closed
6/19/2010	4:27:28 PM	BCl3 valve closed
6/19/2010	4:27:28 PM	PH3 valve closed
6/19/2010	4:27:28 PM	SiCl4 pre valve closed
6/19/2010	4:27:28 PM	SiCl4 post valve closed
6/19/2010	4:27:28 PM	Main Vac valve closed
6/19/2010	4:27:28 PM	Bypass valve closed
6/19/2010	4:27:28 PM	Bubbler valve closed
6/19/2010	4:27:28 PM	Helium valve opened
6/19/2010	4:27:28 PM	Helium MFC set to  500.000000
6/19/2010	4:27:28 PM	H2 MFC set to  0.000000
6/19/2010	4:27:28 PM	BCl3 MFC set to  0.000000
6/19/2010	4:27:28 PM	PHl3 MFC set to  0.000000
6/19/2010	4:27:28 PM	SiCl4 MFC set to  0.000000
6/19/2010	4:27:28 PM	Bypass solenoid MFC set to  0.000000
6/19/2010	4:27:28 PM	Tube furnace set to 0
6/19/2010	4:28:49 PM	Helium valve closed
6/19/2010	4:28:49 PM	H2 valve closed
6/19/2010	4:28:49 PM	BCl3 valve closed
6/19/2010	4:28:49 PM	PH3 valve closed
6/19/2010	4:28:49 PM	SiCl4 pre valve closed
6/19/2010	4:28:49 PM	SiCl4 post valve closed
6/19/2010	4:28:49 PM	Main Vac valve closed
6/19/2010	4:28:49 PM	Bypass valve closed
6/19/2010	4:28:49 PM	Bubbler valve closed
6/19/2010	4:28:49 PM	Helium MFC set to  0.000000
6/19/2010	4:28:49 PM	H2 MFC set to  0.000000
6/19/2010	4:28:49 PM	BCl3 MFC set to  0.000000
6/19/2010	4:28:49 PM	PHl3 MFC set to  0.000000
6/19/2010	4:28:49 PM	SiCl4 MFC set to  0.000000
6/19/2010	4:28:49 PM	Bypass solenoid MFC set to  0.000000
6/19/2010	4:28:49 PM	Tube furnace set to 0
6/19/2010	4:29:04 PM	Helium valve closed
6/19/2010	4:29:04 PM	H2 valve closed
6/19/2010	4:29:04 PM	BCl3 valve closed
6/19/2010	4:29:04 PM	PH3 valve closed
6/19/2010	4:29:04 PM	SiCl4 pre valve closed
6/19/2010	4:29:04 PM	SiCl4 post valve closed
6/19/2010	4:29:04 PM	Main Vac valve closed
6/19/2010	4:29:04 PM	Bubbler valve closed
6/19/2010	4:29:04 PM	Bypass valve opened
6/19/2010	4:29:04 PM	Helium MFC set to  0.000000
6/19/2010	4:29:04 PM	H2 MFC set to  0.000000
6/19/2010	4:29:04 PM	BCl3 MFC set to  0.000000
6/19/2010	4:29:04 PM	PHl3 MFC set to  0.000000
6/19/2010	4:29:04 PM	SiCl4 MFC set to  0.000000
6/19/2010	4:29:04 PM	Bypass solenoid MFC set to  0.000000
6/19/2010	4:29:04 PM	Tube furnace set to 0
6/19/2010	4:29:37 PM	Helium valve closed
6/19/2010	4:29:38 PM	H2 valve closed
6/19/2010	4:29:38 PM	BCl3 valve closed
6/19/2010	4:29:38 PM	PH3 valve closed
6/19/2010	4:29:38 PM	SiCl4 pre valve closed
6/19/2010	4:29:38 PM	SiCl4 post valve closed
6/19/2010	4:29:38 PM	Bubbler valve closed
6/19/2010	4:29:38 PM	Main Vac valve opened
6/19/2010	4:29:38 PM	Bypass valve opened
6/19/2010	4:29:38 PM	Helium MFC set to  0.000000
6/19/2010	4:29:38 PM	H2 MFC set to  0.000000
6/19/2010	4:29:38 PM	BCl3 MFC set to  0.000000
6/19/2010	4:29:38 PM	PHl3 MFC set to  0.000000
6/19/2010	4:29:38 PM	SiCl4 MFC set to  0.000000
6/19/2010	4:29:38 PM	Bypass solenoid MFC set to  0.000000
6/19/2010	4:29:38 PM	Tube furnace set to 0
6/19/2010	4:34:38 PM	H2 valve closed
6/19/2010	4:34:38 PM	BCl3 valve closed
6/19/2010	4:34:38 PM	PH3 valve closed
6/19/2010	4:34:38 PM	SiCl4 pre valve closed
6/19/2010	4:34:38 PM	SiCl4 post valve closed
6/19/2010	4:34:38 PM	Main Vac valve closed
6/19/2010	4:34:38 PM	Bypass valve closed
6/19/2010	4:34:38 PM	Bubbler valve closed
6/19/2010	4:34:38 PM	Helium valve opened
6/19/2010	4:34:38 PM	Helium MFC set to  500.000000
6/19/2010	4:34:38 PM	H2 MFC set to  0.000000
6/19/2010	4:34:38 PM	BCl3 MFC set to  0.000000
6/19/2010	4:34:38 PM	PHl3 MFC set to  0.000000
6/19/2010	4:34:38 PM	SiCl4 MFC set to  0.000000
6/19/2010	4:34:38 PM	Bypass solenoid MFC set to  0.000000
6/19/2010	4:34:38 PM	Tube furnace set to 0
6/19/2010	4:35:59 PM	Helium valve closed
6/19/2010	4:35:59 PM	H2 valve closed
6/19/2010	4:35:59 PM	BCl3 valve closed
6/19/2010	4:35:59 PM	PH3 valve closed
6/19/2010	4:35:59 PM	SiCl4 pre valve closed
6/19/2010	4:35:59 PM	SiCl4 post valve closed
6/19/2010	4:35:59 PM	Main Vac valve closed
6/19/2010	4:35:59 PM	Bypass valve closed
6/19/2010	4:35:59 PM	Bubbler valve closed
6/19/2010	4:35:59 PM	Helium MFC set to  0.000000
6/19/2010	4:35:59 PM	H2 MFC set to  0.000000
6/19/2010	4:35:59 PM	BCl3 MFC set to  0.000000
6/19/2010	4:35:59 PM	PHl3 MFC set to  0.000000
6/19/2010	4:35:59 PM	SiCl4 MFC set to  0.000000
6/19/2010	4:35:59 PM	Bypass solenoid MFC set to  0.000000
6/19/2010	4:35:59 PM	Tube furnace set to 0
6/19/2010	4:36:14 PM	Helium valve closed
6/19/2010	4:36:14 PM	H2 valve closed
6/19/2010	4:36:14 PM	BCl3 valve closed
6/19/2010	4:36:14 PM	PH3 valve closed
6/19/2010	4:36:14 PM	SiCl4 pre valve closed
6/19/2010	4:36:14 PM	SiCl4 post valve closed
6/19/2010	4:36:14 PM	Main Vac valve closed
6/19/2010	4:36:14 PM	Bubbler valve closed
6/19/2010	4:36:14 PM	Bypass valve opened
6/19/2010	4:36:14 PM	Helium MFC set to  0.000000
6/19/2010	4:36:14 PM	H2 MFC set to  0.000000
6/19/2010	4:36:14 PM	BCl3 MFC set to  0.000000
6/19/2010	4:36:14 PM	PHl3 MFC set to  0.000000
6/19/2010	4:36:14 PM	SiCl4 MFC set to  0.000000
6/19/2010	4:36:14 PM	Bypass solenoid MFC set to  0.000000
6/19/2010	4:36:14 PM	Tube furnace set to 0
6/19/2010	4:36:47 PM	Helium valve closed
6/19/2010	4:36:47 PM	H2 valve closed
6/19/2010	4:36:47 PM	BCl3 valve closed
6/19/2010	4:36:48 PM	PH3 valve closed
6/19/2010	4:36:48 PM	SiCl4 pre valve closed
6/19/2010	4:36:48 PM	SiCl4 post valve closed
6/19/2010	4:36:48 PM	Bubbler valve closed
6/19/2010	4:36:48 PM	Main Vac valve opened
6/19/2010	4:36:48 PM	Bypass valve opened
6/19/2010	4:36:48 PM	Helium MFC set to  0.000000
6/19/2010	4:36:48 PM	H2 MFC set to  0.000000
6/19/2010	4:36:48 PM	BCl3 MFC set to  0.000000
6/19/2010	4:36:48 PM	PHl3 MFC set to  0.000000
6/19/2010	4:36:48 PM	SiCl4 MFC set to  0.000000
6/19/2010	4:36:48 PM	Bypass solenoid MFC set to  0.000000
6/19/2010	4:36:48 PM	Tube furnace set to 0
6/19/2010	4:41:48 PM	Helium valve closed
6/19/2010	4:41:48 PM	H2 valve closed
6/19/2010	4:41:48 PM	BCl3 valve closed
6/19/2010	4:41:48 PM	PH3 valve closed
6/19/2010	4:41:48 PM	SiCl4 pre valve closed
6/19/2010	4:41:48 PM	SiCl4 post valve closed
6/19/2010	4:41:48 PM	Bubbler valve closed
6/19/2010	4:41:48 PM	Main Vac valve opened
6/19/2010	4:41:48 PM	Bypass valve opened
6/19/2010	4:41:48 PM	Helium MFC set to  0.000000
6/19/2010	4:41:48 PM	H2 MFC set to  0.000000
6/19/2010	4:41:48 PM	BCl3 MFC set to  0.000000
6/19/2010	4:41:48 PM	PHl3 MFC set to  0.000000
6/19/2010	4:41:48 PM	SiCl4 MFC set to  0.000000
6/19/2010	4:41:48 PM	Bypass solenoid MFC set to  0.000000
6/19/2010	4:41:48 PM	Tube furnace set to 0
6/19/2010	4:41:49 PM	Run finished at 4:41 PM
6/19/2010	4:41:49 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
6/19/2010	4:59:49 PM	Bypass valve closed
6/19/2010	4:59:50 PM	Main Vac valve closed
6/19/2010	4:59:56 PM	Main Vac valve opened
6/19/2010	4:59:57 PM	Bypass valve opened
6/19/2010	5:01:00 PM	Recipe started at 5:00 PM
6/19/2010	5:01:00 PM	Helium valve closed
6/19/2010	5:01:00 PM	BCl3 valve closed
6/19/2010	5:01:00 PM	PH3 valve closed
6/19/2010	5:01:00 PM	SiCl4 pre valve closed
6/19/2010	5:01:00 PM	SiCl4 post valve closed
6/19/2010	5:01:00 PM	Main Vac valve closed
6/19/2010	5:01:00 PM	Bypass valve closed
6/19/2010	5:01:00 PM	Bubbler valve closed
6/19/2010	5:01:00 PM	H2 valve opened
6/19/2010	5:01:00 PM	Helium MFC set to  0.000000
6/19/2010	5:01:00 PM	H2 MFC set to  500.000000
6/19/2010	5:01:00 PM	BCl3 MFC set to  0.000000
6/19/2010	5:01:00 PM	PHl3 MFC set to  0.000000
6/19/2010	5:01:00 PM	SiCl4 MFC set to  0.000000
6/19/2010	5:01:00 PM	Bypass solenoid MFC set to  0.000000
6/19/2010	5:01:00 PM	Tube furnace set to 0
6/19/2010	5:02:23 PM	Helium valve closed
6/19/2010	5:02:23 PM	BCl3 valve closed
6/19/2010	5:02:23 PM	PH3 valve closed
6/19/2010	5:02:23 PM	SiCl4 pre valve closed
6/19/2010	5:02:23 PM	SiCl4 post valve closed
6/19/2010	5:02:23 PM	Main Vac valve closed
6/19/2010	5:02:23 PM	Bypass valve closed
6/19/2010	5:02:23 PM	H2 valve opened
6/19/2010	5:02:23 PM	Bubbler valve opened
6/19/2010	5:02:23 PM	Helium MFC set to  0.000000
6/19/2010	5:02:23 PM	H2 MFC set to  500.000000
6/19/2010	5:02:23 PM	BCl3 MFC set to  0.000000
6/19/2010	5:02:23 PM	PHl3 MFC set to  0.000000
6/19/2010	5:02:23 PM	SiCl4 MFC set to  0.000000
6/19/2010	5:02:23 PM	Bypass solenoid MFC set to  0.000000
6/19/2010	5:02:23 PM	Tube furnace set to 1000
6/19/2010	5:11:33 PM	Helium valve closed
6/19/2010	5:11:33 PM	PH3 valve closed
6/19/2010	5:11:33 PM	Main Vac valve closed
6/19/2010	5:11:33 PM	Bypass valve closed
6/19/2010	5:11:33 PM	H2 valve opened
6/19/2010	5:11:33 PM	BCl3 valve opened
6/19/2010	5:11:33 PM	SiCl4 pre valve opened
6/19/2010	5:11:33 PM	SiCl4 post valve opened
6/19/2010	5:11:33 PM	Bubbler valve opened
6/19/2010	5:11:33 PM	Helium MFC set to  0.000000
6/19/2010	5:11:33 PM	H2 MFC set to  500.000000
6/19/2010	5:11:33 PM	BCl3 MFC set to  35.000000
6/19/2010	5:11:33 PM	PHl3 MFC set to  0.000000
6/19/2010	5:11:33 PM	SiCl4 MFC set to  50.000000
6/19/2010	5:11:33 PM	Bypass solenoid MFC set to  0.000000
6/19/2010	5:11:33 PM	Tube furnace set to 1000
6/19/2010	5:14:47 PM	Helium valve closed
6/19/2010	5:14:47 PM	PH3 valve closed
6/19/2010	5:14:47 PM	Main Vac valve closed
6/19/2010	5:14:47 PM	Bypass valve closed
6/19/2010	5:14:47 PM	H2 valve opened
6/19/2010	5:14:47 PM	BCl3 valve opened
6/19/2010	5:14:47 PM	SiCl4 pre valve opened
6/19/2010	5:14:47 PM	SiCl4 post valve opened
6/19/2010	5:14:47 PM	Bubbler valve opened
6/19/2010	5:14:47 PM	Helium MFC set to  0.000000
6/19/2010	5:14:47 PM	H2 MFC set to  500.000000
6/19/2010	5:14:47 PM	BCl3 MFC set to  35.000000
6/19/2010	5:14:47 PM	PHl3 MFC set to  0.000000
6/19/2010	5:14:47 PM	SiCl4 MFC set to  50.000000
6/19/2010	5:14:47 PM	Bypass solenoid MFC set to  0.000000
6/19/2010	5:14:47 PM	Tube furnace set to 1000
6/19/2010	5:19:47 PM	H2 valve closed
6/19/2010	5:19:47 PM	BCl3 valve closed
6/19/2010	5:19:47 PM	PH3 valve closed
6/19/2010	5:19:47 PM	SiCl4 pre valve closed
6/19/2010	5:19:47 PM	SiCl4 post valve closed
6/19/2010	5:19:47 PM	Main Vac valve closed
6/19/2010	5:19:47 PM	Bypass valve closed
6/19/2010	5:19:47 PM	Helium valve opened
6/19/2010	5:19:47 PM	Bubbler valve opened
6/19/2010	5:19:47 PM	Helium MFC set to  500.000000
6/19/2010	5:19:47 PM	H2 MFC set to  0.000000
6/19/2010	5:19:47 PM	BCl3 MFC set to  0.000000
6/19/2010	5:19:47 PM	PHl3 MFC set to  0.000000
6/19/2010	5:19:47 PM	SiCl4 MFC set to  0.000000
6/19/2010	5:19:47 PM	Bypass solenoid MFC set to  0.000000
6/19/2010	5:19:47 PM	Tube furnace set to 0
6/19/2010	5:39:47 PM	Helium valve closed
6/19/2010	5:39:47 PM	H2 valve closed
6/19/2010	5:39:47 PM	BCl3 valve closed
6/19/2010	5:39:47 PM	PH3 valve closed
6/19/2010	5:39:47 PM	SiCl4 pre valve closed
6/19/2010	5:39:47 PM	SiCl4 post valve closed
6/19/2010	5:39:47 PM	Main Vac valve closed
6/19/2010	5:39:47 PM	Bypass valve closed
6/19/2010	5:39:47 PM	Bubbler valve closed
6/19/2010	5:39:47 PM	Helium MFC set to  0.000000
6/19/2010	5:39:47 PM	H2 MFC set to  0.000000
6/19/2010	5:39:47 PM	BCl3 MFC set to  0.000000
6/19/2010	5:39:47 PM	PHl3 MFC set to  0.000000
6/19/2010	5:39:47 PM	SiCl4 MFC set to  0.000000
6/19/2010	5:39:47 PM	Bypass solenoid MFC set to  0.000000
6/19/2010	5:39:47 PM	Tube furnace set to 0
6/19/2010	5:39:47 PM	Run finished at 5:39 PM
6/19/2010	6:20:38 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/19/2010	6:20:39 PM	Recipe started at 6:20 PM
6/19/2010	6:20:39 PM	Helium valve closed
6/19/2010	6:20:39 PM	H2 valve closed
6/19/2010	6:20:39 PM	BCl3 valve closed
6/19/2010	6:20:39 PM	PH3 valve closed
6/19/2010	6:20:39 PM	SiCl4 pre valve closed
6/19/2010	6:20:39 PM	SiCl4 post valve closed
6/19/2010	6:20:39 PM	Main Vac valve closed
6/19/2010	6:20:39 PM	Bubbler valve closed
6/19/2010	6:20:39 PM	Bypass valve opened
6/19/2010	6:20:39 PM	Helium MFC set to  0.000000
6/19/2010	6:20:39 PM	H2 MFC set to  0.000000
6/19/2010	6:20:39 PM	BCl3 MFC set to  0.000000
6/19/2010	6:20:39 PM	PHl3 MFC set to  0.000000
6/19/2010	6:20:39 PM	SiCl4 MFC set to  0.000000
6/19/2010	6:20:39 PM	Bypass solenoid MFC set to  0.000000
6/19/2010	6:20:39 PM	Tube furnace set to 0
6/19/2010	6:21:27 PM	Helium valve closed
6/19/2010	6:21:27 PM	H2 valve closed
6/19/2010	6:21:27 PM	BCl3 valve closed
6/19/2010	6:21:27 PM	PH3 valve closed
6/19/2010	6:21:27 PM	SiCl4 pre valve closed
6/19/2010	6:21:27 PM	SiCl4 post valve closed
6/19/2010	6:21:27 PM	Bubbler valve closed
6/19/2010	6:21:27 PM	Main Vac valve opened
6/19/2010	6:21:27 PM	Bypass valve opened
6/19/2010	6:21:27 PM	Helium MFC set to  0.000000
6/19/2010	6:21:27 PM	H2 MFC set to  0.000000
6/19/2010	6:21:27 PM	BCl3 MFC set to  0.000000
6/19/2010	6:21:27 PM	PHl3 MFC set to  0.000000
6/19/2010	6:21:27 PM	SiCl4 MFC set to  0.000000
6/19/2010	6:21:27 PM	Bypass solenoid MFC set to  0.000000
6/19/2010	6:21:27 PM	Tube furnace set to 0
6/19/2010	6:21:27 PM	Run finished at 6:21 PM
6/19/2010	6:21:27 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/19/2010	6:41:23 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/19/2010	6:41:24 PM	Recipe started at 6:41 PM
6/19/2010	6:41:24 PM	H2 valve closed
6/19/2010	6:41:24 PM	BCl3 valve closed
6/19/2010	6:41:24 PM	PH3 valve closed
6/19/2010	6:41:24 PM	SiCl4 pre valve closed
6/19/2010	6:41:24 PM	SiCl4 post valve closed
6/19/2010	6:41:24 PM	Main Vac valve closed
6/19/2010	6:41:24 PM	Bypass valve closed
6/19/2010	6:41:24 PM	Bubbler valve closed
6/19/2010	6:41:24 PM	Helium valve opened
6/19/2010	6:41:24 PM	Helium MFC set to  500.000000
6/19/2010	6:41:24 PM	H2 MFC set to  0.000000
6/19/2010	6:41:24 PM	BCl3 MFC set to  0.000000
6/19/2010	6:41:24 PM	PHl3 MFC set to  0.000000
6/19/2010	6:41:24 PM	SiCl4 MFC set to  0.000000
6/19/2010	6:41:24 PM	Bypass solenoid MFC set to  0.000000
6/19/2010	6:41:24 PM	Tube furnace set to 0
6/19/2010	6:42:43 PM	Helium valve closed
6/19/2010	6:42:43 PM	H2 valve closed
6/19/2010	6:42:43 PM	BCl3 valve closed
6/19/2010	6:42:43 PM	PH3 valve closed
6/19/2010	6:42:43 PM	SiCl4 pre valve closed
6/19/2010	6:42:43 PM	SiCl4 post valve closed
6/19/2010	6:42:43 PM	Main Vac valve closed
6/19/2010	6:42:43 PM	Bypass valve closed
6/19/2010	6:42:43 PM	Bubbler valve closed
6/19/2010	6:42:43 PM	Helium MFC set to  0.000000
6/19/2010	6:42:43 PM	H2 MFC set to  0.000000
6/19/2010	6:42:43 PM	BCl3 MFC set to  0.000000
6/19/2010	6:42:43 PM	PHl3 MFC set to  0.000000
6/19/2010	6:42:43 PM	SiCl4 MFC set to  0.000000
6/19/2010	6:42:43 PM	Bypass solenoid MFC set to  0.000000
6/19/2010	6:42:43 PM	Tube furnace set to 0
6/19/2010	6:42:43 PM	Run finished at 6:42 PM
6/19/2010	6:42:43 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/19/2010	6:44:14 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/19/2010	6:44:14 PM	Recipe started at 6:44 PM
6/19/2010	6:44:14 PM	Helium valve closed
6/19/2010	6:44:14 PM	H2 valve closed
6/19/2010	6:44:14 PM	BCl3 valve closed
6/19/2010	6:44:14 PM	PH3 valve closed
6/19/2010	6:44:14 PM	SiCl4 pre valve closed
6/19/2010	6:44:14 PM	SiCl4 post valve closed
6/19/2010	6:44:14 PM	Main Vac valve closed
6/19/2010	6:44:14 PM	Bubbler valve closed
6/19/2010	6:44:14 PM	Bypass valve opened
6/19/2010	6:44:14 PM	Helium MFC set to  0.000000
6/19/2010	6:44:14 PM	H2 MFC set to  0.000000
6/19/2010	6:44:14 PM	BCl3 MFC set to  0.000000
6/19/2010	6:44:14 PM	PHl3 MFC set to  0.000000
6/19/2010	6:44:14 PM	SiCl4 MFC set to  0.000000
6/19/2010	6:44:14 PM	Bypass solenoid MFC set to  0.000000
6/19/2010	6:44:14 PM	Tube furnace set to 0
6/19/2010	6:45:00 PM	Helium valve closed
6/19/2010	6:45:00 PM	H2 valve closed
6/19/2010	6:45:00 PM	BCl3 valve closed
6/19/2010	6:45:00 PM	PH3 valve closed
6/19/2010	6:45:00 PM	SiCl4 pre valve closed
6/19/2010	6:45:00 PM	SiCl4 post valve closed
6/19/2010	6:45:00 PM	Bubbler valve closed
6/19/2010	6:45:00 PM	Main Vac valve opened
6/19/2010	6:45:00 PM	Bypass valve opened
6/19/2010	6:45:00 PM	Helium MFC set to  0.000000
6/19/2010	6:45:00 PM	H2 MFC set to  0.000000
6/19/2010	6:45:00 PM	BCl3 MFC set to  0.000000
6/19/2010	6:45:00 PM	PHl3 MFC set to  0.000000
6/19/2010	6:45:00 PM	SiCl4 MFC set to  0.000000
6/19/2010	6:45:00 PM	Bypass solenoid MFC set to  0.000000
6/19/2010	6:45:00 PM	Tube furnace set to 0
6/19/2010	6:45:01 PM	Run finished at 6:45 PM
6/19/2010	6:45:01 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/19/2010	6:54:48 PM	Tube furnace set to 100
6/19/2010	6:54:53 PM	Helium MFC set to  100.000000
6/19/2010	6:54:54 PM	Helium valve opened
6/19/2010	7:00:21 PM	Helium valve closed
6/19/2010	7:00:23 PM	Helium MFC set to  0.000000
6/19/2010	7:01:25 PM	Bypass valve closed
6/19/2010	7:01:25 PM	Main Vac valve closed
6/19/2010	7:01:35 PM	Main Vac valve opened
6/19/2010	7:01:36 PM	Bypass valve opened
6/19/2010	7:02:20 PM	Tube furnace set to 0
6/19/2010	7:02:29 PM	Recipe started at 7:02 PM
6/19/2010	7:02:30 PM	Helium valve closed
6/19/2010	7:02:30 PM	BCl3 valve closed
6/19/2010	7:02:30 PM	PH3 valve closed
6/19/2010	7:02:30 PM	SiCl4 pre valve closed
6/19/2010	7:02:30 PM	SiCl4 post valve closed
6/19/2010	7:02:30 PM	Main Vac valve closed
6/19/2010	7:02:30 PM	Bypass valve closed
6/19/2010	7:02:30 PM	Bubbler valve closed
6/19/2010	7:02:30 PM	H2 valve opened
6/19/2010	7:02:30 PM	Helium MFC set to  0.000000
6/19/2010	7:02:30 PM	H2 MFC set to  500.000000
6/19/2010	7:02:30 PM	BCl3 MFC set to  0.000000
6/19/2010	7:02:30 PM	PHl3 MFC set to  0.000000
6/19/2010	7:02:30 PM	SiCl4 MFC set to  0.000000
6/19/2010	7:02:30 PM	Bypass solenoid MFC set to  0.000000
6/19/2010	7:02:30 PM	Tube furnace set to 0
6/19/2010	7:03:50 PM	Helium valve closed
6/19/2010	7:03:50 PM	BCl3 valve closed
6/19/2010	7:03:50 PM	PH3 valve closed
6/19/2010	7:03:50 PM	SiCl4 pre valve closed
6/19/2010	7:03:50 PM	SiCl4 post valve closed
6/19/2010	7:03:50 PM	Main Vac valve closed
6/19/2010	7:03:50 PM	Bypass valve closed
6/19/2010	7:03:50 PM	H2 valve opened
6/19/2010	7:03:50 PM	Bubbler valve opened
6/19/2010	7:03:50 PM	Helium MFC set to  0.000000
6/19/2010	7:03:50 PM	H2 MFC set to  500.000000
6/19/2010	7:03:50 PM	BCl3 MFC set to  0.000000
6/19/2010	7:03:50 PM	PHl3 MFC set to  0.000000
6/19/2010	7:03:50 PM	SiCl4 MFC set to  0.000000
6/19/2010	7:03:50 PM	Bypass solenoid MFC set to  0.000000
6/19/2010	7:03:51 PM	Tube furnace set to 1000
6/19/2010	7:12:38 PM	Helium valve closed
6/19/2010	7:12:38 PM	PH3 valve closed
6/19/2010	7:12:38 PM	Main Vac valve closed
6/19/2010	7:12:38 PM	Bypass valve closed
6/19/2010	7:12:38 PM	H2 valve opened
6/19/2010	7:12:38 PM	BCl3 valve opened
6/19/2010	7:12:38 PM	SiCl4 pre valve opened
6/19/2010	7:12:38 PM	SiCl4 post valve opened
6/19/2010	7:12:38 PM	Bubbler valve opened
6/19/2010	7:12:38 PM	Helium MFC set to  0.000000
6/19/2010	7:12:38 PM	H2 MFC set to  500.000000
6/19/2010	7:12:38 PM	BCl3 MFC set to  35.000000
6/19/2010	7:12:38 PM	PHl3 MFC set to  0.000000
6/19/2010	7:12:38 PM	SiCl4 MFC set to  50.000000
6/19/2010	7:12:38 PM	Bypass solenoid MFC set to  0.000000
6/19/2010	7:12:38 PM	Tube furnace set to 1000
6/19/2010	7:15:52 PM	Helium valve closed
6/19/2010	7:15:52 PM	PH3 valve closed
6/19/2010	7:15:52 PM	Main Vac valve closed
6/19/2010	7:15:52 PM	Bypass valve closed
6/19/2010	7:15:52 PM	H2 valve opened
6/19/2010	7:15:52 PM	BCl3 valve opened
6/19/2010	7:15:52 PM	SiCl4 pre valve opened
6/19/2010	7:15:52 PM	SiCl4 post valve opened
6/19/2010	7:15:52 PM	Bubbler valve opened
6/19/2010	7:15:52 PM	Helium MFC set to  0.000000
6/19/2010	7:15:52 PM	H2 MFC set to  500.000000
6/19/2010	7:15:52 PM	BCl3 MFC set to  35.000000
6/19/2010	7:15:52 PM	PHl3 MFC set to  0.000000
6/19/2010	7:15:52 PM	SiCl4 MFC set to  50.000000
6/19/2010	7:15:52 PM	Bypass solenoid MFC set to  0.000000
6/19/2010	7:15:52 PM	Tube furnace set to 1000
6/19/2010	7:20:52 PM	H2 valve closed
6/19/2010	7:20:52 PM	BCl3 valve closed
6/19/2010	7:20:52 PM	PH3 valve closed
6/19/2010	7:20:52 PM	SiCl4 pre valve closed
6/19/2010	7:20:52 PM	SiCl4 post valve closed
6/19/2010	7:20:52 PM	Main Vac valve closed
6/19/2010	7:20:52 PM	Bypass valve closed
6/19/2010	7:20:52 PM	Helium valve opened
6/19/2010	7:20:52 PM	Bubbler valve opened
6/19/2010	7:20:52 PM	Helium MFC set to  500.000000
6/19/2010	7:20:52 PM	H2 MFC set to  0.000000
6/19/2010	7:20:52 PM	BCl3 MFC set to  0.000000
6/19/2010	7:20:53 PM	PHl3 MFC set to  0.000000
6/19/2010	7:20:53 PM	SiCl4 MFC set to  0.000000
6/19/2010	7:20:53 PM	Bypass solenoid MFC set to  0.000000
6/19/2010	7:20:53 PM	Tube furnace set to 0
6/19/2010	7:40:53 PM	Helium valve closed
6/19/2010	7:40:53 PM	H2 valve closed
6/19/2010	7:40:53 PM	BCl3 valve closed
6/19/2010	7:40:53 PM	PH3 valve closed
6/19/2010	7:40:53 PM	SiCl4 pre valve closed
6/19/2010	7:40:53 PM	SiCl4 post valve closed
6/19/2010	7:40:53 PM	Main Vac valve closed
6/19/2010	7:40:53 PM	Bypass valve closed
6/19/2010	7:40:53 PM	Bubbler valve closed
6/19/2010	7:40:53 PM	Helium MFC set to  0.000000
6/19/2010	7:40:53 PM	H2 MFC set to  0.000000
6/19/2010	7:40:53 PM	BCl3 MFC set to  0.000000
6/19/2010	7:40:53 PM	PHl3 MFC set to  0.000000
6/19/2010	7:40:53 PM	SiCl4 MFC set to  0.000000
6/19/2010	7:40:53 PM	Bypass solenoid MFC set to  0.000000
6/19/2010	7:40:53 PM	Tube furnace set to 0
6/19/2010	7:40:53 PM	Run finished at 7:40 PM
6/19/2010	8:44:11 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/19/2010	8:44:11 PM	Recipe started at 8:44 PM
6/19/2010	8:44:11 PM	Helium valve closed
6/19/2010	8:44:11 PM	H2 valve closed
6/19/2010	8:44:11 PM	BCl3 valve closed
6/19/2010	8:44:11 PM	PH3 valve closed
6/19/2010	8:44:11 PM	SiCl4 pre valve closed
6/19/2010	8:44:11 PM	SiCl4 post valve closed
6/19/2010	8:44:11 PM	Main Vac valve closed
6/19/2010	8:44:11 PM	Bubbler valve closed
6/19/2010	8:44:11 PM	Bypass valve opened
6/19/2010	8:44:11 PM	Helium MFC set to  0.000000
6/19/2010	8:44:11 PM	H2 MFC set to  0.000000
6/19/2010	8:44:11 PM	BCl3 MFC set to  0.000000
6/19/2010	8:44:11 PM	PHl3 MFC set to  0.000000
6/19/2010	8:44:11 PM	SiCl4 MFC set to  0.000000
6/19/2010	8:44:11 PM	Bypass solenoid MFC set to  0.000000
6/19/2010	8:44:11 PM	Tube furnace set to 0
6/19/2010	8:44:58 PM	Helium valve closed
6/19/2010	8:44:58 PM	H2 valve closed
6/19/2010	8:44:58 PM	BCl3 valve closed
6/19/2010	8:44:58 PM	PH3 valve closed
6/19/2010	8:44:58 PM	SiCl4 pre valve closed
6/19/2010	8:44:58 PM	SiCl4 post valve closed
6/19/2010	8:44:58 PM	Bubbler valve closed
6/19/2010	8:44:58 PM	Main Vac valve opened
6/19/2010	8:44:58 PM	Bypass valve opened
6/19/2010	8:44:58 PM	Helium MFC set to  0.000000
6/19/2010	8:44:58 PM	H2 MFC set to  0.000000
6/19/2010	8:44:58 PM	BCl3 MFC set to  0.000000
6/19/2010	8:44:58 PM	PHl3 MFC set to  0.000000
6/19/2010	8:44:58 PM	SiCl4 MFC set to  0.000000
6/19/2010	8:44:58 PM	Bypass solenoid MFC set to  0.000000
6/19/2010	8:44:58 PM	Tube furnace set to 0
6/19/2010	8:44:59 PM	Run finished at 8:44 PM
6/19/2010	8:44:59 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
